Towards wafer-scale 2D material sensors

Peter G Steeneken, Miika Soikkeli, Sanna Arpiainen, Arto Rantala, Raivo Jaaniso, Roberto Pezone, Sten Vollebregt, Sebastian Lukas, Satender Kataria, Maurits JA Houmes, Ruslan Álvarez-Diduk, Kangho Lee, Hutomo Suryo Wasisto, Sebastian Anzinger, Marc Fueldner, Gerard J Verbiest, Farbod Alijani, Dong Hoon Shin, Ermin Malic, Richard van Rijn, Tarja K Nevanen, Alba Centeno, Amaia Zurutuza, Herre SJ van der Zant, Arben Merkoçi, Georg S Duesberg, Max C Lemme. 2D Materials

The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact. [Link to the article]